The first ALD (Atomic Layer Deposition) equipment from Beneq with the Kontron AIS control framework ToolCommander® was put into operation at the end customer. It was pre-tested in the Beneq Headquarter, in Espoo (Finland). The coating system is now used in China in a cluster for OLED microdisplay production. The Beneq system consists of a heater, loadlock, transfer module and a process module, which is controlled by Beneq. A special feature is that single-wafer processes and batch processes can run in the system. In addition to the equipment control solution using the ToolCommander® Kontron AIS also realized a custom host integration protocol.